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Electroplating moulds using dry film thick negative photoresist
Kukharenka, E, Farooqui, M M, Grigore, L, Kraft, M, Hollinshead, NVolume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/4/311
Date:
July, 2003
File:
PDF, 677 KB
english, 2003