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Fabrication optimization of a micro-spherical fiber probe with the Taguchi method
Fan, Kuang-Chao, Wang, Weili, Chiou, Horng-ShingVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/1/015011
Date:
January, 2008
File:
PDF, 557 KB
english, 2008