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Design and calibration of a MEMS sensor for measuring the force and torque acting on a magnetic microrobot
Beyeler, Felix, Muntwyler, Simon, Nagy, Zoltan, Graetzel, Chauncey, Moser, Matthias, Nelson, Bradley JVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/2/025004
Date:
February, 2008
File:
PDF, 492 KB
english, 2008