A reflow process for glass microlens array fabrication by use of precision compression molding
Chen, Yang, Yi, Allen Y, Yao, Donggang, Klocke, Fritz, Pongs, GuidoVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/5/055022
Date:
May, 2008
File:
PDF, 1.05 MB
english, 2008