An out-of-plane rotational platform with in-plane...

Journal of Micromechanics and Microengineering 2009 / 07 Vol. 19; Iss. 7

An out-of-plane rotational platform with in-plane electrostatic combs made by the MetalMUMPs process

Tsai, Jui-che, Lai, Ren-Jie, Yin, Chun-Yi, Chen, Dian-Sheng, Yeh, Po-Fan
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Volume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/7/074007
Date:
July, 2009
File:
PDF, 1.15 MB
english, 2009
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