Reconstructing the 3D etch rate distribution of silicon in...

Reconstructing the 3D etch rate distribution of silicon in anisotropic etchants using data from vicinal {1 0 0}, {1 1 0} and {1 1 1} surfaces

Gosálvez, M A, Pal, Prem, Sato, K
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/10/105018
Date:
October, 2011
File:
PDF, 478 KB
english, 2011
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