Development of individually-addressable parylene microtube arrays
Li, Yuefa, Tu, Hongen, Iezzi, Raymond, Finlayson, Paul, Xu, YongVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/11/115005
Date:
November, 2011
File:
PDF, 2.26 MB
english, 2011