Parylene C-on-photoresist (POP): a low temperature spacer scheme for polymer/metal nanowire fabrication
Li, Yuanhui, Xie, Quan, Wang, Wei, Zheng, Mingxin, Zhang, Hao, Lei, Yinhua, Zhang, Haixia Alice, Wu, Wengang, Li, ZhihongVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/6/067001
Date:
June, 2011
File:
PDF, 492 KB
english, 2011