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Fabrication of PDMS through-holes using the MIMIC method and the surface treatment by atmospheric-pressure CH 4 /He RF plasma
Choi, Jongchan, Lee, Kyeong-Hwan, Yang, SungVolume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/9/097001
Date:
September, 2011
File:
PDF, 1.30 MB
english, 2011