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Optical transmission performance of a surface-micromachined Fabry–Pérot interferometer for thermal infrared
Tuohiniemi, M, Blomberg, M, Akujärvi, A, Antila, J, Saari, HVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/115004
Date:
November, 2012
File:
PDF, 84 KB
english, 2012