An electrical contact resistance model including roughness effect for a rough MEMS switch
Li, Longqiu, Song, Wenping, Zhang, Guangyu, Jia, DanVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/115023
Date:
November, 2012
File:
PDF, 1.56 MB
english, 2012