Flexible tactile sensor for shear stress measurement using transferred sub-µm-thick Si piezoresistive cantilevers
Noda, Kentaro, Onoe, Hiroaki, Iwase, Eiji, Matsumoto, Kiyoshi, Shimoyama, IsaoVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/115025
Date:
November, 2012
File:
PDF, 1.04 MB
english, 2012