Micromachined cryogenic cooler for cooling electronic...

Journal of Micromechanics and Microengineering 2013 / 02 Vol. 23; Iss. 2

Micromachined cryogenic cooler for cooling electronic devices down to 30 K

Cao, H S, Holland, H J, Vermeer, C H, Vanapalli, S, Lerou, P P P M, Blom, M, ter Brake, H J M
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025014
Date:
February, 2013
File:
PDF, 90 KB
english, 2013
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