Temperature control of Ar induction thermal plasma with...

Temperature control of Ar induction thermal plasma with diatomic molecular gases by pulse amplitude modulation of the coil current

Tanaka, Yasunori, Sakuta, Tadahiro
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Volume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/1/309
Date:
February, 2003
File:
PDF, 418 KB
english, 2003
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