Temperature control of Ar induction thermal plasma with diatomic molecular gases by pulse amplitude modulation of the coil current
Tanaka, Yasunori, Sakuta, TadahiroVolume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/1/309
Date:
February, 2003
File:
PDF, 418 KB
english, 2003