A large area multifilamentary plasma source
Awasthi, L M, Ravi, G, Anitha, V P, Srivastava, P K, Mattoo, S KVolume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/2/306
Date:
May, 2003
File:
PDF, 396 KB
english, 2003