Effect of non-local electron conductivity on power...

Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges

Ramamurthi, Badri, Economou, Demetre J, Kaganovich, Igor D
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Volume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/2/308
Date:
May, 2003
File:
PDF, 434 KB
english, 2003
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