Effect of non-local electron conductivity on power absorption and plasma density profiles in low pressure inductively coupled discharges
Ramamurthi, Badri, Economou, Demetre J, Kaganovich, Igor DVolume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/2/308
Date:
May, 2003
File:
PDF, 434 KB
english, 2003