Instabilities in an inductively coupled oxygen plasma

Plasma Sources Science and Technology 2003 / 05 Vol. 12; Iss. 2

Instabilities in an inductively coupled oxygen plasma

Corr, C S, Steen, P G, Graham, W G
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Volume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/2/318
Date:
May, 2003
File:
PDF, 72 KB
english, 2003
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