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A novel approach for negative ion analysis using 160 GHz microwave interferometry and laser photodetachment in oxygen cc-rf plasmas
Küllig, C, Dittmann, K, Meichsner, JVolume:
19
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/19/6/065011
Date:
December, 2010
File:
PDF, 540 KB
english, 2010