Effects of high-dose Ge ion implantation and...

Chinese Physics 2007 / 04 Vol. 16; Iss. 4

Effects of high-dose Ge ion implantation and post-implantation annealing on ZnO thin films

Shu-Wen, Xue, Xiao-Tao, Zu, Hai-Qiao, Su, Wan-Guo, Zheng, Xia, Xiang, Hong, Deng, Chun-Rong, Yang
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Volume:
16
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/16/4/043
Date:
April, 2007
File:
PDF, 597 KB
english, 2007
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