Improving the uniformity of RF-plasma density by a humped...

Chinese Physics B 2008 / 11 Vol. 17; Iss. 11

Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna

Xu, Xu, Lin-Sen, Li, Feng, Liu, Qian-Hong, Zhou, Rong-Qing, Liang
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Volume:
17
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/17/11/047
Date:
November, 2008
File:
PDF, 2.24 MB
english, 2008
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