Microtrenching effect of SiC ICP etching in SF...

Microtrenching effect of SiC ICP etching in SF 6 /O 2 plasma

Ruixue, Ding, Yintang, Yang, Ru, Han
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/30/1/016001
Date:
January, 2009
File:
PDF, 659 KB
english, 2009
Conversion to is in progress
Conversion to is failed