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SOI-based radial-contour-mode micromechanical disk resonator
Jia, Yingqian, Zhao, Zhengping, Yang, Yongjun, Hu, Xiaodong, Li, QianVolume:
32
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/32/11/115001
Date:
November, 2011
File:
PDF, 2.07 MB
english, 2011