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Accurate determination of surface orientation of single-crystal wafers using high-resolution X-ray rocking curve measurements
Kim, Chang Soo, Bin, Seok Min, Jeon, Hyeon-Gu, O, Byungsung, Choi, Young DaeVolume:
46
Language:
english
Journal:
Journal of Applied Crystallography
DOI:
10.1107/s0021889813020669
Date:
October, 2013
File:
PDF, 606 KB
english, 2013