Accurate determination of surface orientation of...

Accurate determination of surface orientation of single-crystal wafers using high-resolution X-ray rocking curve measurements

Kim, Chang Soo, Bin, Seok Min, Jeon, Hyeon-Gu, O, Byungsung, Choi, Young Dae
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
46
Language:
english
Journal:
Journal of Applied Crystallography
DOI:
10.1107/s0021889813020669
Date:
October, 2013
File:
PDF, 606 KB
english, 2013
Conversion to is in progress
Conversion to is failed