![](/img/cover-not-exists.png)
XFACT: a furnace analysis and characterization tool
Kumar, R.C.K., De Gyvez, J.P.Volume:
8
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.350761
Date:
January, 1995
File:
PDF, 322 KB
english, 1995