XFACT: a furnace analysis and characterization tool

IEEE Transactions on Semiconductor Manufacturing 1995 / Feb. Vol. 8; Iss. 1

XFACT: a furnace analysis and characterization tool

Kumar, R.C.K., De Gyvez, J.P.
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Volume:
8
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.350761
Date:
January, 1995
File:
PDF, 322 KB
english, 1995
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