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[IEEE 2012 Asia Pacific Microwave Conference (APMC) - Kaohsiung, Taiwan (2012.12.4-2012.12.7)] 2012 Asia Pacific Microwave Conference Proceedings - Fabrication of AlGaN/GaN high electron mobility transistors (HEMTs) on silicon substrate with slant field plates using deep-UV lithography featuring 5W/mm power density at X-band
Chang, Chia-Hua, Hsu, Heng-Tung, Huang, Lu-Che, Chiang, Che-Yang, Chang, Edward YiYear:
2012
Language:
english
DOI:
10.1109/apmc.2012.6421785
File:
PDF, 455 KB
english, 2012