[IEEE Proceedings of European Meeting on Lasers and...

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[IEEE Proceedings of European Meeting on Lasers and Electro-Optics - Hamburg, Germany (1996.09.8-1996.09.13)] Proceedings of European Meeting on Lasers and Electro-Optics CLEOE-96 - High-Accuracy Measurements of the Spacing of Diffraction Gratfngs in the Range 0.28/spl mu/m -0.50 /spl mu/m Using Laser Interferometric Diffractometry

Korotkov, V.l., Podkin, S.A., Vitushkhin, A.L., Vitushkin, L.F.
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Year:
1996
Language:
english
DOI:
10.1109/cleoe.1996.562304
File:
PDF, 124 KB
english, 1996
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