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[IEEE 2014 International Conference on Planarization/CMP Technology (ICPT) - Kobe, Japan (2014.11.19-2014.11.21)] Proceedings of International Conference on Planarization/CMP Technology 2014 - Atomically smooth gallium nitride surfaces generated by chemical mechanical polishing with non-noble metal catalyst(Fe-Nx/C) in acid solution
Xu, Li, Pan, Guoshun, Zou, Chunli, Shi, Xiaolei, Liu, YuyuYear:
2014
Language:
english
DOI:
10.1109/icpt.2014.7017289
File:
PDF, 178 KB
english, 2014