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[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - Reliability study of AlTi / TiW, polysilicon and ohmic contacts for piezoresistive pressure sensors applications
Andrei, A., Malhaire, C., Brida, S., Barbier, D.Year:
2004
Language:
english
DOI:
10.1109/icsens.2004.1426374
File:
PDF, 376 KB
english, 2004