[IEEE IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society - Taipei, Taiwan (2007.11.5-2007.11.8)] IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society - Development of the Nano-Measuring Machine stage
Jywe, Wen-Yuh, Jeng, Yeau-Ren, Teng, Yun-Feng, Wang, Hung-Shu, Wu, Chia-HungYear:
2007
Language:
english
DOI:
10.1109/iecon.2007.4460035
File:
PDF, 2.26 MB
english, 2007