![](/img/cover-not-exists.png)
[IEEE International Electron Devices Meeting. Technical Digest - San Francisco, CA, USA (8-11 Dec. 1996)] International Electron Devices Meeting. Technical Digest - A new high temperature electrode-barrier technology on high density ferroelectric capacitor structure
Onishi, S., Nagata, M., Mitarai, S., Ito, Y., Kudo, J., Sakiyama, K., Desu, S.B., Bhatt, H.D., Vijay, D.P., Hwang, Y.Year:
1996
Language:
english
DOI:
10.1109/iedm.1996.554077
File:
PDF, 438 KB
english, 1996