[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A Closed-loop MEMS-based Spotter Integrating Position Sensors with Nanometric Precision for the Control of Droplet Uniformity
Leichle, Thierry, Saya, Daisuke, Pourciel, Jean-Bernard, Mathieu, Fabrice, Bergaud, Christian, Nicu, LiviuYear:
2006
Language:
english
DOI:
10.1109/nems.2006.334883
File:
PDF, 4.49 MB
english, 2006