[IEEE 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Clearwater, FL, USA (2009.08.17-2009.08.20)] 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Fabrication of Arrayed Waveguide Grating by the casting method using a micro-die

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