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[IEEE IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference - Las Vegas, NV, USA (17-22 June 2001)] IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) - Lorentz force effect on electron energy distribution in low pressure inductively coupled plasmas
Kolobov, V.I., Godyak, V.A.Year:
2001
Language:
english
DOI:
10.1109/ppps.2001.961052
File:
PDF, 89 KB
english, 2001