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[IEEE 2010 35th IEEE Photovoltaic Specialists Conference (PVSC) - Honolulu, HI, USA (2010.06.20-2010.06.25)] 2010 35th IEEE Photovoltaic Specialists Conference - Effects of hydrogen dilution on electron density in multi-hollow discharges with magnetic field for A-Si:H film deposition
Koga, Kazunori, Kawashima, Yuuki, Nakahara, Kenta, Matsunaga, Takeaki, Nakamura, William Makoto, Shiratani, MasaharuYear:
2010
Language:
english
DOI:
10.1109/pvsc.2010.5616502
File:
PDF, 738 KB
english, 2010