[IEEE 2006 IEEE International Reliability Physics Symposium Proceedings - San Jose, CA, USA (2006.03.26-2006.03.30)] 2006 IEEE International Reliability Physics Symposium Proceedings - Enhanced GOI Degradation and Reliability Improvement of Nitrogen and Indium Co-Implant for Advanced Dual-Gate Oxide Application
Wang, J.s., Wu, Nan-cyi, Lu, Hui, Wang, Tings, Hsieh, Joe, Hsu, H.k., Chen, Dino, Fong, Thomas, Mei, LenYear:
2006
Language:
english
DOI:
10.1109/relphy.2006.251336
File:
PDF, 422 KB
english, 2006