[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method
Yung-Chun Lee,, Chun-Ying Wu,, Ling-Sheng Jang,, Yi-Chu Hsu,Volume:
2
Year:
2005
Language:
english
DOI:
10.1109/sensor.2005.1497337
File:
PDF, 766 KB
english, 2005