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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Qualification and Applications of a Piezoelectric MEMS Process
Poppe, E., Ostbo, N. P., Booij, W., Tyholdt, F., Calame, F., Hok, B., Jensen, F., Raeder, H., Muralt, P.Year:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300184
File:
PDF, 1.15 MB
english, 2007