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[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Proposition of Atomic Force Probes Based on Silicon Ring-Resonators
Faucher, Marc, Walter, Benjamin, Rollier, Anne-Sophie, Seguini, Karim, Legrand, Bernard, Couturier, Gerard, Aime, Jean-Pierre, Bernard, Charlotte, Boisgard, Rodolphe, Buchaillot, LionelYear:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300436
File:
PDF, 877 KB
english, 2007