![](/img/cover-not-exists.png)
[IEEE 2013 International Semiconductor Conference (CAS 2013) - Sinaia, Romania (2013.10.14-2013.10.16)] CAS 2013 (International Semiconductor Conference) - Modifications of silicon nitride materials for SONOS memories
Ioannou-Sougleridis, V., Dimitrakis, P., Normand, P., Nikolaou, N., Simatos, D., Bonafos, C., Schamm-Chardon, S., Benassayag, G.Year:
2013
Language:
english
DOI:
10.1109/smicnd.2013.6688073
File:
PDF, 2.53 MB
english, 2013