[IEEE 2003 IEEE International Conference on Robotics and Automation (Cat No 03CH37422) SOI-03) - Newport Beach, CA, USA (2003.10.2-2003.10.2)] 2003 IEEE International Conference on Robotics and Automation (Cat No 03CH37422) SOI-03) - Silicon single crystal on quartz: fabrication and benefits
Brunier,, Rayssac,, Cayrefourcq,, Oka,, Sato,, Fournel,, Lagahe,Year:
2003
Language:
english
DOI:
10.1109/soi.2003.1242897
File:
PDF, 154 KB
english, 2003