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Investigation of Barrier Property of Copper Manganese Alloy on Ruthenium
Su, Yin-Hsien, Wu, Sze-Ann, Wu, Chia-Yang, Wang, Ying-Lang, Lee, Wen-HsiVolume:
15
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2014.2386319
Date:
March, 2015
File:
PDF, 1.98 MB
english, 2015