Variable Frequency Microwave and Convection Furnace Curing...

IEEE Transactions on Semiconductor Manufacturing 2007 / 08 Vol. 20; Iss. 3

Variable Frequency Microwave and Convection Furnace Curing of Polybenzoxazole Buffer Layer for GaAs HBT Technology

Yota, Jiro, Ly, Hoa, Ramanathan, Ravi, Sun, Hsiang-Chih, Barone, Dragana, Nguyen, Thinh, Katoh, Kohji, Ohe, Masayuki, Hubbard, Robert L., Hicks, Keith
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Volume:
20
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2007.901410
Date:
August, 2007
File:
PDF, 3.29 MB
english, 2007
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