Classification of Defect Clusters on Semiconductor Wafers...

IEEE Transactions on Semiconductor Manufacturing 2008 / 05 Vol. 21; Iss. 2

Classification of Defect Clusters on Semiconductor Wafers Via the Hough Transformation

White,, K. Preston, Kundu, Bijoy, Mastrangelo, Christina M.
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Volume:
21
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2008.2000269
Date:
May, 2008
File:
PDF, 998 KB
english, 2008
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