Thermal Stress Effects on the Electrical Properties of...

Thermal Stress Effects on the Electrical Properties of p-Channel Polycrystalline-Silicon Thin-Film Transistors Fabricated via Metal-Induced Lateral Crystallization

Park, Jae Hyo, Seok, Ki Hwan, Kiaee, Zohreh, Kim, Hyung Yoon, Chae, Hee Jae, Lee, Sol Kyu, Joo, Seung Ki
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Volume:
28
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2014.2373353
Date:
February, 2015
File:
PDF, 940 KB
english, 2015
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