Carrier Profiling Technology in Ten Nanometers Devices
Hirota, Jun, Harada, Kazunori, Nakai, Tsukasa, Tamaoki, Makiko, Takeno, Shiro, Akahori, HiroshiVolume:
28
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2015.2436405
Date:
August, 2015
File:
PDF, 582 KB
english, 2015