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[IEEE 2008 IEEE Ultrasonics Symposium (IUS) - Beijing, China (2008.11.2-2008.11.5)] 2008 IEEE Ultrasonics Symposium - Fabrication and characterization of surface micromachined CMUT with a bossed membrane
Mengli Wang,, Jingkuang Chen,, Xiaoyang Cheng,, Chuan Li,, Xueyuan Liu,Year:
2008
Language:
english
DOI:
10.1109/ultsym.2008.0097
File:
PDF, 1.62 MB
english, 2008