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[IEEE 2006 6th World Congress on Intelligent Control and Automation - Dalian, China ()] 2006 6th World Congress on Intelligent Control and Automation - Investigate on Characteristics of Gas Film Damping of Capacitive Micro Accelerometers
Weidong Wang,, Jianyuan Jia,, Daxing Zhang,Year:
2006
Language:
english
DOI:
10.1109/wcica.2006.1713604
File:
PDF, 113 KB
english, 2006