Manufacturing and Characterization of a Deformable Membrane...

International Journal of Applied Ceramic Technology 2013 / 05 Vol. 10; Iss. 3

Manufacturing and Characterization of a Deformable Membrane with Integrated Temperature Sensors and Heating Structures in Low Temperature Co-fired Ceramics

Gutzeit, Nam, Müller, Jens, Reinlein, Claudia, Gebhardt, Sylvia
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Volume:
10
Language:
english
Journal:
International Journal of Applied Ceramic Technology
DOI:
10.1111/ijac.12037
Date:
May, 2013
File:
PDF, 284 KB
english, 2013
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