Mechanistic study of plasma damage of low k dielectric...

Mechanistic study of plasma damage of low k dielectric surfaces

Bao, J., Shi, H., Liu, J., Huang, H., Ho, P. S., Goodner, M. D., Moinpour, M., Kloster, G. M.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2834562
File:
PDF, 685 KB
english, 2008
Conversion to is in progress
Conversion to is failed