Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 6
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Model based hybrid proximity effect correction scheme combining dose modulation and shape adjustments
Klimpel, Thomas, Schulz, Martin, Zimmermann, Rainer, Stock, Hans-Jürgen, Zepka, AlexVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3662879
File:
PDF, 1.19 MB
english, 2011